Features of 300mm FOUP:
●Conforms to the SEMI standard
●ESD protective design
●Class 1 cleanliness or better.  
●High reliability, cost-saving

Features of 200mm SMIF POD:
●Conforms to the SEMI standard
●Door adopts ESD static-resistant material  
●Class 1 cleanliness or better  
●High reliability, cost-saving  
●Assemble/disassemble free when shell is being cleaned  
●Door can be cleaned
●Optional Code Plate (POD code management)
●Parts’ color sare changeable according to different requirements of semiconductor process

Features of 150mm SMIF POD
●Conforms to the SEMI standard  
●ESD protective design  
●Class 1 cleanliness or better  
●High reliability and cost-saving with integrated design  
●Assemble/disassemble free, shell is cleanable

Features of 200mm SMIF POD Opener:
●Conforms to the SEMI standard  
●Wafer protrusion sensing and automatic wafer reseating
●Sense of wafer mapping, wafer cross-slotting and double wafer slotting
●Positioning precision reaches 0.01mm.
●Cycle Time<20 seconds
●Protocol of parallel and serial SECSΙ/ Ⅱcommunications  
●Manufacturing cost-saving, easy assembly and maintenance with modular design

Features of full-automation POD cleaning machine:
●Two modes selection: full automation or manual operation deperd of physical circumstance  
 Cleaning time and working time can be set.
●Customers design solutions
●Safe use and handsome appearance with SUS stainless steel frame.
●24 hour continuous operation.
●Easy operation.
●Time-saving:cleaning and drying at one time with twin chamber design.
●Conform to high cleaning requiremet of pod.
●Compact structure: less space required.
●Adopts immerging-type ultrasonic cleaning method.

The features of OEM business for cleaning FOSB :
●To meet customers’ demands, E-SUN extended its OEM business and has become the main partner of TSMC (Taiwan Semiconductor Manufacturing Co., Ltd.) for cleaning 300mm FOSB. E-SUN have the high level equipment and environment which are class 1 clean room, HPLC Chromatography, liquid particle counter, air particle counter to assure the best quality.