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200mm SMIF POD Opener
Features of 200mm SMIF POD Opener:
●Conforms to the SEMI standard  
●Wafer protrusion sensing and automatic wafer reseating
●Sense of wafer mapping, wafer cross-slotting and double wafer slotting
●Positioning precision reaches 0.01mm.
●Cycle Time<20 seconds
●Protocol of parallel and serial SECSΙ/ Ⅱcommunications  
●Manufacturing cost-saving, easy assembly and maintenance with modular design
 
 
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