200mm SMIF POD
Features of 200mm SMIF POD:
●Conforms to the SEMI standard
●Door adopts ESD static-resistant material  
●Class 1 cleanliness or better  
●High reliability, cost-saving  
●Assemble/disassemble free when shell is being cleaned  
●Door can be cleaned
●Optional Code Plate (POD code management)
●Parts’ color sare changeable according to different requirements of semiconductor process